overlayer vs substratum

overlayer

noun
  • A layer of adatoms adsorbed onto a surface, as onto the surface of a single crystal. 

substratum

noun
  • A substrate. 

  • The underlying cause or basis of something. 

  • A layer that lies underneath another. 

How often have the words overlayer and substratum occurred in a corpus of books? (source: Google Ngram Viewer )